Chemical Engineering Series

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Anyone involved in the field of chemical engineering or responsible for process design, maintenance, and analysis will appreciate Process Engineering Analysis in Semiconductor Device Fabrication, which offers comprehensive coverage of the growing interest in process improvement. The book includes recent material presented with a degree of integration and criticism not available in the original journal publications. Worked examples illustrate how to use fundamental principles to model processes. Where possible, models are compared with experimental data, and the success and/or failure of a model is presented as a learning experience. An extensive set of problems offers an opportunity for the reader to explore directions beyond the scope of the book itself. The authors' vast combined experience in chemical engineering, process engineering, electrical engineering, and physics provides expert insight and broad exposure to new areas of technology.