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Galvanic Etching of Silicon

For Fabrication of Micromechanical Structures

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IOS Press is an international science, technical and medical publisher of high-quality books for academics, scientists, and professionals in all fields. Some of the areas we publish -Biomedicine-Oncology-Artificial intelligence-Databases and information systems-Maritime engineering-Nanotechnology-Geoengineering-All aspects of physics-E-governance-E-commerce-The knowledge economy-Urban studies-Arms control-Understanding and responding to terrorism-Medical informatics-Computer Sciences

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Galvanic Etching of Silicon, Colin M. A. Ashruf

Taal
Jaar van publicatie
2000
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(Paperback)
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Titel
Galvanic Etching of Silicon
Ondertitel
For Fabrication of Micromechanical Structures
Taal
Engels
Uitgever
IOS Press
Jaar van publicatie
2000
Formaat
Paperback
Aantal pagina's
157
ISBN10
9040720010
ISBN13
9789040720017
Reeks
Aantekening
IOS Press is an international science, technical and medical publisher of high-quality books for academics, scientists, and professionals in all fields. Some of the areas we publish -Biomedicine-Oncology-Artificial intelligence-Databases and information systems-Maritime engineering-Nanotechnology-Geoengineering-All aspects of physics-E-governance-E-commerce-The knowledge economy-Urban studies-Arms control-Understanding and responding to terrorism-Medical informatics-Computer Sciences