Proceedings / ICPT 2007

Meer over het boek

Upon several requests towards increased co-operation of the local CMP users groups from Germany, Japan, Korea, Taiwan, and the United States of America, the idea of a joint international CMP conference emerged in 2005. Following successful conferences in Tokyo, Japan (PacRim-CMP 2004), Seoul, Korea (PacRim-CMP 2005) and Foster City, California, USA (ICPT 2006), the International Conference on Planarization/CMP Technology ICPT 2007 in Dresden, Germany, is organized by the German CMP User Group within the German VDE/ VDI-Society Microelectronics, Micro- and Precision Engineering. The mission of this conference is the provision of a forum for the worldwide CMP community for exchange and discussion on a high scientific level in order to support and advance the developments of this highly important field of semiconductor manufacturing.