Laser Processing of Thin Films and Microstructures

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Focusing on the advancements in laser processing of thin films, this text provides an in-depth exploration of the field, particularly in dielectrics. It encompasses the historical context, theoretical foundations, and experimental techniques essential for understanding laser interactions with materials. The book details various processing conditions enabled by intense photon beams and examines the resulting film properties and microstructures. It also covers critical topics such as film deposition, nucleation, oxidation, and etching, comparing these methods with traditional and emerging technologies.